Laser-based fabrication of microfluidic components and systems

Joohan Kim; Xianfan Xu

doi:10.1117/12.478144

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17 January 2003 Laser-based fabrication of microfluidic components and systems

Joohan Kim, Xianfan Xu

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Proceedings Volume 4982, Microfluidics, BioMEMS, and Medical Microsystems; (2003) https://doi.org/10.1117/12.478144
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Diffuser micro-pumps are commonly fabricated with the standard lithography techniques using silicon as the base material. The important components of this kind of micro-pump are flow directing diffusers and a moving diaphragm. Different diffuser designs show various flow rates and pump efficiency. In this work, polymer is used as its base material instead of silicon. Polymer is cost-effective and relatively easy to be machined with an Excimer laser. Moreover, the flexibility of the material gives a much better performance compared with the silicon based micro-pumps. The measured flow rate of this pump is 10 to 20 times higher than that of the silicon based micro-pumps. In addition, the performance of the diffuser polymer micro-pump is simulated with FLUENT and the calculated result at low frequency is in good agreement with the experimental result.

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Joohan Kim and Xianfan Xu "Laser-based fabrication of microfluidic components and systems", Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); https://doi.org/10.1117/12.478144

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