17 January 2003 Molded multilevel modular microfluidic devices
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Proceedings Volume 4982, Microfluidics, BioMEMS, and Medical Microsystems; (2003); doi: 10.1117/12.472890
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
In this paper, we present a quasi-three-dimensional micro-fluidic device that has been constructed using the LIGA technology at CAMD. The idea is centered in the modular construction of molded plastic devices. A primary master template was patterned into SU-8 and PMMA, from which we made a reversed insertion mold by electroplating Nickel on it. Chips were patterned by hot embossing and the complex structure was obtained by stacking one layer on top of the other. Alignment marks were placed in each different layer to allow the accurate positioning of the structures. Each layer is a 2-dimensional micro-fluidic system and liquids can go from one level to another level, back and forth, producing this almost three-dimensional behavior. This work aims to introduce concepts and features that will be a step towards a complete modularization of micro-fluidic devices.
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Flavio Aristone, Proyag Datta, Yohannes M. Desta, Alexey Marques Espindola, Jost Goettert, "Molded multilevel modular microfluidic devices", Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); doi: 10.1117/12.472890; https://doi.org/10.1117/12.472890
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KEYWORDS
Liquids

Nickel

Electroplating

Polymethylmethacrylate

Microfluidics

Photomasks

Plating

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