Commercial Status of MOEMS Applications
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 1 (21 January 2003); doi: 10.1117/12.480762
Testing Methods for MOEMS
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 11 (21 January 2003); doi: 10.1117/12.480763
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 26 (21 January 2003); doi: 10.1117/12.472753
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 34 (21 January 2003); doi: 10.1117/12.477925
Mirror Arrays and Switches I
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 53 (21 January 2003); doi: 10.1117/12.477936
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 65 (21 January 2003); doi: 10.1117/12.477928
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 75 (21 January 2003); doi: 10.1117/12.477927
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 87 (21 January 2003); doi: 10.1117/12.472899
MOEMS Interconnects
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 94 (21 January 2003); doi: 10.1117/12.473690
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 102 (21 January 2003); doi: 10.1117/12.477926
Mirror Arrays and Switches II
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 109 (21 January 2003); doi: 10.1117/12.472787
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 114 (21 January 2003); doi: 10.1117/12.472904
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 122 (21 January 2003); doi: 10.1117/12.480764
New MOEMS Applications: Spectrometers, Probes, and Microfluidics
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 127 (21 January 2003); doi: 10.1117/12.477919
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 139 (21 January 2003); doi: 10.1117/12.472893
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 149 (21 January 2003); doi: 10.1117/12.472895
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 159 (21 January 2003); doi: 10.1117/12.477935
MOEMS Optical Components: VOAs and Lasers
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 167 (21 January 2003); doi: 10.1117/12.477922
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 179 (21 January 2003); doi: 10.1117/12.477921
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 188 (21 January 2003); doi: 10.1117/12.477923
MOEMS Optical Components: Filters
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 195 (21 January 2003); doi: 10.1117/12.477918
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 203 (21 January 2003); doi: 10.1117/12.477916
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 215 (21 January 2003); doi: 10.1117/12.472762
Joint Session I. MEMS Adaptive Optic I: Large Scale Integration
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 172 (20 January 2003); doi: 10.1117/12.478562
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 180 (20 January 2003); doi: 10.1117/12.472902
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 193 (20 January 2003); doi: 10.1117/12.477931
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 204 (20 January 2003); doi: 10.1117/12.477932
Joint Session II. MEMS Adaptive Optics II: Applications
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 230 (20 January 2003); doi: 10.1117/12.477924
Joint Session IV. MEMS Adaptive Optics IV: Membrane Mirrors
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 250 (20 January 2003); doi: 10.1117/12.473642
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 259 (20 January 2003); doi: 10.1117/12.472730
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 271 (20 January 2003); doi: 10.1117/12.473715
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 287 (20 January 2003); doi: 10.1117/12.477917
Poster Session
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 359 (21 January 2003); doi: 10.1117/12.472909
Joint Session III. MEMS Adaptive Optics III: Late News
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 242 (20 January 2003); doi: 10.1117/12.480906
Testing Methods for MOEMS
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, pg 44 (21 January 2003); doi: 10.1117/12.499274
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