20 January 2003 Electrostatically actuated membrane mirrors for adaptive optics
Author Affiliations +
Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.473642
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
We are developing membrane mirrors for use in adaptive optics, particularly in astronomy and vision science. We have micro-fabricated membrane mirrors from single crystal silicon using wet chemical etching and reactive ion etching. Membrane size, tension and operating voltage were selected to allow greater deformation of the mirror surface at low operating voltage than previous membrane mirror designs. Mirror devices consist of independently fabricated membrane and electrode array chips that are flip chip bonded together. We have fabricated electrode arrays with 256 and 1024 electrodes, and active diameters ranging from 6-10 mm (comparable to the size of the human pupil). Membrane-electrode hybrids are mounted to ceramic packages, wire bonded, and driven by off chip, D/A electronics. These devices are milestones in the development of an electret membrane mirror.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Kurczynski, Peter Kurczynski, Gregory R. Bogart, Gregory R. Bogart, Warren Y-C. Lai, Warren Y-C. Lai, Victor Lifton, Victor Lifton, William M. Mansfield, William M. Mansfield, J. Anthony Tyson, J. Anthony Tyson, Bernard Sadoulet, Bernard Sadoulet, David R. Williams, David R. Williams, } "Electrostatically actuated membrane mirrors for adaptive optics", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); doi: 10.1117/12.473642; https://doi.org/10.1117/12.473642

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