MEMS spatial light modulators with integrated electronics

Thomas Becker; Thomas G. Bifano; Hocheol Lee; Michele Miller; Paul A. Bierden; Steven Cornelissen

doi:10.1117/12.477931

20 January 2003 MEMS spatial light modulators with integrated electronics

Thomas Becker, Thomas G. Bifano, Hocheol Lee, Michele Miller, Paul A. Bierden, Steven Cornelissen

Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.477931
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

The design, fabrication, and preliminary test results of a microelectromechanical, micromachined spatial light modulator (μSLM) with complementary metal-oxide semiconductor (CMOS) electronics, for control of optical phase is presented in this paper. An array of 32×32 piston-motion MEMS mirror segments make up the μSLM. Each mirror segment will be capable of altering the phase of reflected light by up to one wavelength for infrared illumination (? = 1.5 μm). The mirror segments are fabricated from metal in a low temperature process allowing for vertical integration of the μSLM with CMOS based, multi-bit, control electronics. The surface of the CMOS is planarized to facilitate μSLM-CMOS integration. The fabrication process and process development results, test results, including frequency response and electromechanical characterization of the (μSLM) actuators, will be presented.

Citation Download Citation

Thomas Becker, Thomas G. Bifano, Hocheol Lee, Michele Miller, Paul A. Bierden, and Steven Cornelissen "MEMS spatial light modulators with integrated electronics", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); https://doi.org/10.1117/12.477931

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available