20 January 2003 MEMS spatial light modulators with integrated electronics
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Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.477931
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
The design, fabrication, and preliminary test results of a microelectromechanical, micromachined spatial light modulator (μSLM) with complementary metal-oxide semiconductor (CMOS) electronics, for control of optical phase is presented in this paper. An array of 32×32 piston-motion MEMS mirror segments make up the μSLM. Each mirror segment will be capable of altering the phase of reflected light by up to one wavelength for infrared illumination (? = 1.5 μm). The mirror segments are fabricated from metal in a low temperature process allowing for vertical integration of the μSLM with CMOS based, multi-bit, control electronics. The surface of the CMOS is planarized to facilitate μSLM-CMOS integration. The fabrication process and process development results, test results, including frequency response and electromechanical characterization of the (μSLM) actuators, will be presented.
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Thomas Becker, Thomas G. Bifano, Hocheol Lee, Michele Miller, Paul A. Bierden, Steven Cornelissen, "MEMS spatial light modulators with integrated electronics", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); doi: 10.1117/12.477931; https://doi.org/10.1117/12.477931
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