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21 January 2003 Microelectromechanical optical switch
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Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003)
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Have developed relatively simple and compact design of microelectromechanical optical switch of electrostatic type containing cardan structure including two movable elements: the outer one, in central part of which the mirror is formed, and which perform beam scanning along the X axis, and the inner one which deflect beam along the Y axis. The movable elements and the basis are connected successively by the torsion pairs positioned along the mutually perpendicular axes. Originality of the design consists in fabrication of inner element in the form of plate having in its central part the cavity, on the bottom of which the electrodes are formed to turn the inner element. The axes of both pairs of torsions and mirror being positioned in the same plane. The distinctive feature of the switch operation is independence and constancy of the mirror position under any order of signals supply to the control movable and unmoveable electrodes. Corresponding theoretical calculations have been performed, and optimum relations of constructive elements sizes are presented. The switch provides enhancement of spatial addressing precision, reducing of mass and dimension parameters, control apparatus simplification.
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Nikolay Ivanovich Mukhurov and Georgy I. Efremov "Microelectromechanical optical switch", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003);

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