21 January 2003 Optical system properties of a reconfigurable MEMS interconnect
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Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.473690
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
The optical system properties of a reconfigurable surface micromachined micro-electro-mechanical system (MEMS) interconnect are presented. An array of optical signals from a singlemode MT connector is first collimated by a refractive lenslet array. Each beam may be individually redirected by a rotatable, 45 degree flip-up MEMS mirror. The second, complimentary MEMS mirror folds the optical beam back through the lenslet array and couples it into a second fiber row on the MT connector. Much work has been presented promoting the utility of MEMS configurations to manipulate optical signals. This work examines, with ray tracing simulations, the proposed configuration from the detailed optical system perspective.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shanalyn A. Kemme, Shanalyn A. Kemme, Olga Blum-Spahn, Olga Blum-Spahn, Fawn R. Gass, Fawn R. Gass, Daryl J. Dagel, Daryl J. Dagel, Grant D. Grossetete, Grant D. Grossetete, "Optical system properties of a reconfigurable MEMS interconnect", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003); doi: 10.1117/12.473690; https://doi.org/10.1117/12.473690


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