Out-of-plane rotary micromirrors for reconfigurable photonic applications

Daryl J. Dagel; Olga Blum Spahn; James J. Allen; Shanalyn A. Kemme; Grant D. Grossetete; Fawn R. Gass

doi:10.1117/12.472904

21 January 2003 Out-of-plane rotary micromirrors for reconfigurable photonic applications

Daryl J. Dagel, Olga Blum Spahn, James J. Allen, Shanalyn A. Kemme, Grant D. Grossetete, Fawn R. Gass

Author Affiliations +

Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.472904
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A slow-speed optical fiber cross-connect has been developed around surface-micromachined MEMS mirrors that pop up 45 degrees relative to the substrate and rotate 360 degrees about the normal axis. Various assembly, latching, and rotational mechanisms have been evaluated and tested, with current work focusing on demonstrating functionality. Routing capability has been characterized for 2 × 2 arrays of micromirrors, the feedback from which has been applied to second-generation designs with improved control and greater precision. The cross-connect described here is scalable and represents an important building block in a general-purpose photonic infrastructure.

Citation Download Citation

Daryl J. Dagel, Olga Blum Spahn, James J. Allen, Shanalyn A. Kemme, Grant D. Grossetete, and Fawn R. Gass "Out-of-plane rotary micromirrors for reconfigurable photonic applications", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003); https://doi.org/10.1117/12.472904

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