17 January 2003 Applications of spin-on-glass for waveguide and micro-optical systems
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Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.477859
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
We have developed a material system, a fabrication process, and optical designs that allow for direct integration of patternable optical components onto microelectronics and optoelectronics platforms. The spin-on-glass is a sol-gel platform that has a low waveguide loss with the ability to incorporate a waveguide amplifier. Our material and process includes the ability to fabricate 3-D structures in a single photolithography step. In this paper, we present details of our fabrication process, general materials characteristics, and some optical designs for planar lightwave circuit platforms.
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Patrick J. Moyer, Patrick J. Moyer, Ramazan Benrashid, Ramazan Benrashid, Pascal Dupriez, Pascal Dupriez, Faramarz Farahi, Faramarz Farahi, } "Applications of spin-on-glass for waveguide and micro-optical systems", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); doi: 10.1117/12.477859; https://doi.org/10.1117/12.477859
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