17 January 2003 Applications of spin-on-glass for waveguide and micro-optical systems
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Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.477859
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
We have developed a material system, a fabrication process, and optical designs that allow for direct integration of patternable optical components onto microelectronics and optoelectronics platforms. The spin-on-glass is a sol-gel platform that has a low waveguide loss with the ability to incorporate a waveguide amplifier. Our material and process includes the ability to fabricate 3-D structures in a single photolithography step. In this paper, we present details of our fabrication process, general materials characteristics, and some optical designs for planar lightwave circuit platforms.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Patrick J. Moyer, Patrick J. Moyer, Ramazan Benrashid, Ramazan Benrashid, Pascal Dupriez, Pascal Dupriez, Faramarz Farahi, Faramarz Farahi, } "Applications of spin-on-glass for waveguide and micro-optical systems", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); doi: 10.1117/12.477859; https://doi.org/10.1117/12.477859


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