17 January 2003 High-speed gray-scale laser direct-write technology for micro-optic fabrication
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Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.472908
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
Binary Laser Direct-Write (LDW) raster-scan technology for UV exposure of photosensitive materials has been used for single or multiple-pass exposure applications. Gray-scale LDW can be applied to manufacture of 3-D optical structures, but the system requirements are substantially different, since edge slopes and surface departures must be controlled to within fractions of a wavelength.. In this paper, we explore the differences between binary and gray-scale raster imaging applied to micro-optic fabrication, and compare the system model with a prototype high-speed, gray-scale LDW tool that was developed from a Laser Direct Imaging tool originally designed for binary applications.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John M. Tamkin, Brett Bagwell, Bradley T. Kimbrough, Ghassan Jabbour, Michael R. Descour, "High-speed gray-scale laser direct-write technology for micro-optic fabrication", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); doi: 10.1117/12.472908; https://doi.org/10.1117/12.472908
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