Novel method of fabrication of diffractive mocrolens arrays

Sihai Chen; Xinjian Yi; Hong Ma; Guang Huang; Hongchen Wang; Tao Xiong; Xiong Li; Xiongwei Li

doi:10.1117/12.501841

17 January 2003 Novel method of fabrication of diffractive microlens arrays

Sihai Chen, Xinjian Yi, Hong Ma, Guang Huang, Hongchen Wang, Tao Xiong, Xiong Li, Xiongwei Li

Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.501841
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A new method, self-alignment process is introduced to fabricate microlens arrays. By this method, during fabrication process, the rigorous alignment, which has great effect on diffraction efficiency in the conventional multi-photolithography process, is avoided. The large arrays of 1500 × 640 element silica microlens with 8-phase-level are manufactured by this method. The measurement results show that the 8-phase-level microlens arrays diffraction efficiency is as high as 93%, which is higher than by the conventional method.

Citation Download Citation

Sihai Chen, Xinjian Yi, Hong Ma, Guang Huang, Hongchen Wang, Tao Xiong, Xiong Li, and Xiongwei Li "Novel method of fabrication of diffractive microlens arrays", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); https://doi.org/10.1117/12.501841

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