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17 January 2003 Replication of micro-optical elements in hybrid organic-inorganic materials
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Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.472901
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
In this paper, a detailed study of replication of microlenses by UV-assisted moulding in hybrid glass materials is presented. Circular aspherical, spherical and cylindrical microlenses were designed and fabricated in photoresist by using the grey-scale lithography based on high-energy beam sensitive glass. A semi-transparent replication master was then generated. Hybrid organic-inorganic resins were synthesized by sol-gel processing of functionalized alkoxysilanes. The resin viscosity and refractive index depended on synthesis conditions. Transparent, well adhering, several tens of microns-thick films were deposited on fused silica substrates by adjusting the solvent content of the formulation. The thermal expansion coefficient of our material, determined by a Michelson interferometric technique was 1.75 10-4 K-1. High replication fidelity e. g. better than 5% is demonstrated by controlling changes, at the various process steps, in the radius of curvature i.e. focal lengths of microlenses performing the measurements with a Twyman-Green interferometer. Close to diffraction limited microlenses with f-numbers ranging from f/1.4 to f/10 were fabricated.
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Patrice A. Topart, Rene M. Beaulieu, Sebastien Leclair, Michel Poirier, Jeremy Pelletier, M. Bernier, and Hubert Jerominek "Replication of micro-optical elements in hybrid organic-inorganic materials", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); https://doi.org/10.1117/12.472901
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