Translator Disclaimer
17 January 2003 Replication of micro-optical elements in hybrid organic-inorganic materials
Author Affiliations +
Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003)
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
In this paper, a detailed study of replication of microlenses by UV-assisted moulding in hybrid glass materials is presented. Circular aspherical, spherical and cylindrical microlenses were designed and fabricated in photoresist by using the grey-scale lithography based on high-energy beam sensitive glass. A semi-transparent replication master was then generated. Hybrid organic-inorganic resins were synthesized by sol-gel processing of functionalized alkoxysilanes. The resin viscosity and refractive index depended on synthesis conditions. Transparent, well adhering, several tens of microns-thick films were deposited on fused silica substrates by adjusting the solvent content of the formulation. The thermal expansion coefficient of our material, determined by a Michelson interferometric technique was 1.75 10-4 K-1. High replication fidelity e. g. better than 5% is demonstrated by controlling changes, at the various process steps, in the radius of curvature i.e. focal lengths of microlenses performing the measurements with a Twyman-Green interferometer. Close to diffraction limited microlenses with f-numbers ranging from f/1.4 to f/10 were fabricated.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Patrice A. Topart, Rene M. Beaulieu, Sebastien Leclair, Michel Poirier, Jeremy Pelletier, M. Bernier, and Hubert Jerominek "Replication of micro-optical elements in hybrid organic-inorganic materials", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003);

Back to Top