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20 January 2003 Assembly and testing of a grating-based electrostatic comb-drive visible microspectrometer
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Proceedings Volume 4985, MOEMS Display and Imaging Systems; (2003)
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Interrogation and analysis of hazardous agents in a hostile environment is difficult using currently available visible spectroscopic instrumentation due to both the size and cost of existing devices. One proposed method to decrease the size and cost of current visible spectrometers uses Micro-Opto-Electro Mechanical Systems (MOEMS) and die-level photo-diodes instead of static bulk gratings and linear detector arrays. We propose a grating based electrostatic comb driven visible micro-spectrometer that allows spectroscopy to be performed in the harshest of environments for a cost that, up until now, has been restricted. Our proposed device is approximately 50 mm2 in size, which makes it portable enough to gather spectroscopic data discreetly and remotely. The use of MOEMS and precision micro-machined optics allows this device a level of accuracy and mechanical ruggedness that conventional bulk grating spectrometers lack. Commercial-off-the-shelf (COTS) optical components are combined with state-of-the-art (SOA) photolithography techniques that reduce production costs while increasing manufacturability. The novel design of this spectroscopic device allows it to be utilized in a wide range of applications, from collecting data on an unmanned ground vehicle or acting as a passive sensor that remotely evaluates the introduction or reduction of certain reagents. Principles of assembly, operation and testing will be presented in this paper.
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Larry Christopher Heaton, Jeff A. Fisher, and Michael S. Kranz "Assembly and testing of a grating-based electrostatic comb-drive visible microspectrometer", Proc. SPIE 4985, MOEMS Display and Imaging Systems, (20 January 2003);

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