Off-axis variable focus and aberration control mirrors

Phillip A. Himmer; David L. Dickensheets

doi:10.1117/12.477815

20 January 2003 Off-axis variable focus and aberration control mirrors

Phillip A. Himmer, David L. Dickensheets

Proceedings Volume 4985, MOEMS Display and Imaging Systems; (2003) https://doi.org/10.1117/12.477815
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Elliptical-boundary deformable mirrors have been developed for focus control of an optical beam incident at forty-five degrees with respect to the surface normal. The mirrors are silicon nitride membranes 1.4×1 mm in size, designed to accommodate a 1 mm diameter beam. Two electrostatic actuation zones provide control over spherical aberration. Focal lengths ranging from infinity to 36 mm have been achieved, and the mirror surface figure has been characterized to quantify aberration. Residual aberrations have been observed to be less than λ/5 (peak to peak) measured at λ = 660 nm.

Citation Download Citation

Phillip A. Himmer and David L. Dickensheets "Off-axis variable focus and aberration control mirrors", Proc. SPIE 4985, MOEMS Display and Imaging Systems, (20 January 2003); https://doi.org/10.1117/12.477815

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