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20 January 2003 Off-axis variable focus and aberration control mirrors
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Proceedings Volume 4985, MOEMS Display and Imaging Systems; (2003)
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Elliptical-boundary deformable mirrors have been developed for focus control of an optical beam incident at forty-five degrees with respect to the surface normal. The mirrors are silicon nitride membranes 1.4×1 mm in size, designed to accommodate a 1 mm diameter beam. Two electrostatic actuation zones provide control over spherical aberration. Focal lengths ranging from infinity to 36 mm have been achieved, and the mirror surface figure has been characterized to quantify aberration. Residual aberrations have been observed to be less than λ/5 (peak to peak) measured at λ = 660 nm.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Phillip A. Himmer and David L. Dickensheets "Off-axis variable focus and aberration control mirrors", Proc. SPIE 4985, MOEMS Display and Imaging Systems, (20 January 2003);

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