20 January 2003 Optics and MEMS: a new opportunity for innovation
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Proceedings Volume 4985, MOEMS Display and Imaging Systems; (2003) https://doi.org/10.1117/12.477814
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
Optics has been a technology for a long time. Often, just when it looked like the technology was beginning to diminish in impact, a new technology related to optics was born and completely rejuvenated the field. This caused significant innovation in relatively short periods of time. For example, the development of the laser in the early 1960s gave rise to laser printers, CD disk drives, optical recording, fiber optic communication etc. and has produced an enormous increase in practical devices as well as economic value. We are now faced with another opportunity. This opportunity is the ability to fabricate small optical "benches" or structures using the same material that has enabled the computer revolution, viz. silicon. While this field is relatively new, what might we expect from this new capability? The opportunity for displays, sensors, communication, etc. are beginning to open up and present new business and innovation possibilities. Optics has always benefited from system enabling technologies and Micro-Electro-Mechanical-Systems is a major new development. In this paper I will look at where we might go with Optics and MEMS or MOEMS. Examples of display concepts, etc. will be discussed that illustrate the great potential of these combined capabilities in just one area. It is likely that we will not be limited by the technology but by our imagination in its use.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gary K. Starkweather, Gary K. Starkweather, } "Optics and MEMS: a new opportunity for innovation", Proc. SPIE 4985, MOEMS Display and Imaging Systems, (20 January 2003); doi: 10.1117/12.477814; https://doi.org/10.1117/12.477814
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