17 June 2003 Thermally tunable optical filter array
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Proceedings Volume 4989, Optical Devices for Fiber Communication IV; (2003) https://doi.org/10.1117/12.479820
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States
Abstract
A novel MEMS-based tunable optical filter, an essential component for monitoring and reconfiguration of optical wavelength-division multiplexing networks, is presented. The device is based on a Fabry-Perot interferometer employing multiple solid-state silicon cavities and silicon-based dielectric Bragg mirrors. Tuning is achieved through thermal modulation of the resonator's optical thickness. It is fabricated as a free-standing membrane using silicon MEMS technology. The filter membrane is fixed by micromachined suspension arms, which thermally isolates it against the substrate. The present concept features low power consumption and fast thermal modulation. Light coupling to the filter array is realized by positioning of fibers and the filter chip in a micro-optical bench setup.
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Dennis Hohlfeld, Dennis Hohlfeld, Matthias Epmeier, Matthias Epmeier, Hans P. Zappe, Hans P. Zappe, } "Thermally tunable optical filter array", Proc. SPIE 4989, Optical Devices for Fiber Communication IV, (17 June 2003); doi: 10.1117/12.479820; https://doi.org/10.1117/12.479820
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