You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
8 February 1985Spectrophotometric Measurement Of Thin Film Thickness In The 90 To 10,000 Nanometer Region
We report here a new measurement technique (patents pending), using a modified, commercially available spectroradiometer and software program which instantly and directly measures thin film thicknesses in the range from 90 nm (3.5 microinches) up to as much as 10,000 nm (394 pin). This measurement technique is applicable to "flying height" determination and other thin film applications. The computer software algorithm determines the thin film thickness directly (within seconds) from the broadband whitelight interference spectra. The algorithm uses the theoretical physics formula for thin film interference and uses the measured intensities and wavelengths to solve for the thickness directly. Because of the "closeness to theory" it is not necessary to absolute spectral-radiance-calibrate the spectroradiometer. Since the algorithm predicts the theoretical (perfect) energy spectrum, it compares its distance estimate to the theoretical spectrum, thus providing an estimate of "goodness of fit" of the thickness measurement.
Fred Alan Wolf
"Spectrophotometric Measurement Of Thin Film Thickness In The 90 To 10,000 Nanometer Region", Proc. SPIE 0499, Optical Radiation Measurements, (8 February 1985); https://doi.org/10.1117/12.971081
The alert did not successfully save. Please try again later.
Fred Alan Wolf, "Spectrophotometric Measurement Of Thin Film Thickness In The 90 To 10,000 Nanometer Region," Proc. SPIE 0499, Optical Radiation Measurements, (8 February 1985); https://doi.org/10.1117/12.971081