14 July 2003 Electro-optic waveguide modulators by the integration of self-assembled superlattices with polymeric and semiconductor materials
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Proceedings Volume 4991, Organic Photonic Materials and Devices V; (2003) https://doi.org/10.1117/12.479441
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States
Abstract
We describe here the fabrication and characterization of novel organic electro-optic materials composed of self-assembled superlattices. The SAS structures are intrinsically acentric and exhibit large second harmonic generation and electro-optic responses. This approach using SAS electro-optic materials has advantages such as not requiring poling for creating nonlinearity in the films and efficient film growth on a variety of substrates over large areas. Prototype waveguide electro-optic modulators have been fabricated using SAS films integrated wtih low-loss polymeric materials functioning as partial guiding and cladding layers. The waveguide EO modulators are fabricated using a multistep process including e-beam deposition, plasma-enhanced chemical vapor deposition, photolithogrpahy, and reactive ion etching. Electro-optic parameters such as thehalf-wave voltage and the effective electro-optic coefficient, and the velocity mismatch between the optical and radio frequency waves have been evaluated.
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Tobin J. Marks, Seng Tiong Ho, Zhifu Liu, Peiwang Zhu, De-Gui Sun, Jing Ma, Yegao Xiao, Hu Kang, "Electro-optic waveguide modulators by the integration of self-assembled superlattices with polymeric and semiconductor materials", Proc. SPIE 4991, Organic Photonic Materials and Devices V, (14 July 2003); doi: 10.1117/12.479441; https://doi.org/10.1117/12.479441
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