Material development and processing for electro-optic device systems

Danliang Jin; Raluca Dinu; Timothy Parker; Anna Barklund; Lou Bintz; Baoquan Chen; Christoph Flaherty; Hann Wen Guan; Diyun Huang; Jeffrey Kressbach; Timothy Londergan; Thomas Mino; Galina Todorova; Simon Yang

doi:10.1117/12.479448

14 July 2003 Material development and processing for electro-optic device systems

Danliang Jin, Raluca Dinu, Timothy Parker, Anna Barklund, Lou Bintz, Baoquan Chen, Christoph Flaherty, Hann Wen Guan, Diyun Huang, Jeffrey Kressbach, Timothy Londergan, Thomas Mino, Galina Todorova, Simon Yang

Author Affiliations +

Proceedings Volume 4991, Organic Photonic Materials and Devices V; (2003) https://doi.org/10.1117/12.479448
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States

Abstract

New crosslinked clad polymers were developed for electro-optic polymer modulators with special attention paid to properties such as refractive index tunability, optical loss, and conductivity. These cured polymers showed relatively low optical loss at 1550 nm and desirable conductivity. The clads were used to fabricate electro-optic devices having mode profiles closely matched to that of optical fibers in order to reduce insertion loss. A new hardmasking technique was developed to define Mach-Zehnder rib waveguides by photolithography and dry etching with high reliability and surface smoothness. The hardmasking technique demonstrated flexibility in defining waveguides made with electro-optic polymers having different reactivity towards etchant gasses.

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Danliang Jin, Raluca Dinu, Timothy Parker, Anna Barklund, Lou Bintz, Baoquan Chen, Christoph Flaherty, Hann Wen Guan, Diyun Huang, Jeffrey Kressbach, Timothy Londergan, Thomas Mino, Galina Todorova, and Simon Yang "Material development and processing for electro-optic device systems", Proc. SPIE 4991, Organic Photonic Materials and Devices V, (14 July 2003); https://doi.org/10.1117/12.479448

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