Design Method For Ultra-High Resolution Linear CCD Imagers

Larry Shey-Ping Sheu; Thanh Truong; Larry Yuzuki; Abdul Elhatem; Narayan Kadekodi

doi:10.1117/12.944649

8 November 1984 Design Method For Ultra-High Resolution Linear CCD Imagers

Larry Shey-Ping Sheu, Thanh Truong, Larry Yuzuki, Abdul Elhatem, Narayan Kadekodi

Proceedings Volume 0501, State-of-the-Art Imaging Arrays and Their Applications; (1984) https://doi.org/10.1117/12.944649
Event: 28th Annual Technical Symposium, 1984, San Diego, United States

Abstract

This paper presents the design method to achieve ultra-high resolution linear imagers. This method utilizes advanced design rules and novel staggered bilinear photo sensor arrays with quadrilinear shift registers. Design constraint in the detector arrays and shift registers are analyzed. Imager architecture to achieve ultra-high resolution is presented. The characteristics of MTF, aliasing, speed, transfer efficiency and fine photolithography requirements associated with this architecture are also discussed. A CCD imager with advanced 1.5 um minimum feature size was fabricated. It is intended as a test vehicle for the next generation small sampling pitch ultra-high resolution CCD imager. Standard double-poly, two-phase shift registers were fabricated at an 8 um pitch using the advanced design rules. A special process step that blocked the source-drain implant from the shift register area was invented. This guaranteed excellent performance of the shift registers regardless of the small poly overlaps. A charge transfer efficiency of better than 0.99995 and maximum transfer speed of 8 MHz were achieved. The imager showed excellent performance. The dark current was less than 0.2 mV/ms, saturation 250 mV, adjacent photoresponse non-uniformity ± 4% and responsivity 0.7 V/ μJ/cm² for the 8 μm x 6 μm photosensor size. The MTF was 0.6 at 62.5 cycles/mm. These results confirm the feasibility of the next generation ultra-high resolution CCD imagers.

Citation Download Citation

Larry Shey-Ping Sheu, Thanh Truong, Larry Yuzuki, Abdul Elhatem, and Narayan Kadekodi "Design Method For Ultra-High Resolution Linear CCD Imagers", Proc. SPIE 0501, State-of-the-Art Imaging Arrays and Their Applications, (8 November 1984); https://doi.org/10.1117/12.944649

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