11 June 2003 Fabrication of square spiral photonic crystals by glancing angle deposition
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Proceedings Volume 5023, 10th International Symposium on Nanostructures: Physics and Technology; (2003); doi: 10.1117/12.511549
Event: 2003 Chapter books, 2003, Bellingham, WA, United States
Abstract
Using Glancing Angle Deposition, a novel thin film deposition technique, it is possible to fabricate complex, periodic structures suited for applications in photonic band gap crystals. In comparison to complex lithography processes used to produce conventional structures on the scale of several nanometers, GLAD is ideally suited to a virtual single step deposition, producing a novel tetragonal square spiral crystal structure and having a large predicted band gap of up to 15%.
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Scott R. Kennedy, Michael J. Brett, O. Toader, Sajeev John, "Fabrication of square spiral photonic crystals by glancing angle deposition", Proc. SPIE 5023, 10th International Symposium on Nanostructures: Physics and Technology, (11 June 2003); doi: 10.1117/12.511549; https://doi.org/10.1117/12.511549
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KEYWORDS
Photonic crystals

Crystals

Diamond

Fabrication

Thin film deposition

Thin films

Lithography

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