11 June 2003 Monte Carlo simulation of self-organized quantum dot structures: crossover from kinetics to thermodynamics
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Abstract
We study the heteroepitaxial growth of self-assembled quantum dots in strained semiconductors in the Stranski-Krastanov growth mode using kinetic Monte Carlo simulations. Optimization of growth parameters such as temperature, deposition rate, coverage, and growth interruption time is discussed. In particular, we investigate the crossover between kinetically controlled and thermodynamically limited growth, and thereby resolve the seemingly contradictory temperature dependence of the average dot size.
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M. Meixner, M. Meixner, R. Kunert, R. Kunert, E. Schoell, E. Schoell, Vitaly A. Shchukin, Vitaly A. Shchukin, Dieter Bimberg, Dieter Bimberg, "Monte Carlo simulation of self-organized quantum dot structures: crossover from kinetics to thermodynamics", Proc. SPIE 5023, 10th International Symposium on Nanostructures: Physics and Technology, (11 June 2003); doi: 10.1117/12.510422; https://doi.org/10.1117/12.510422
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