Translator Disclaimer
11 June 2003 Resonant tunneling metal-oxide-silicon nanostructure
Author Affiliations +
Abstract
Some evidences for an ability of a metal-oxide-silicon (MOS) structure, widely used in the current integrated circuit electronics, to operate as a resonant tunneling diode are discussed. The energy band diagram of the MOS structure based on a highly doped p-Si (NA in the range of 1018 - 1020 cm-3) with an oxide thickness in the tunnel transparent range of 1 - 4 nm in reverse bias presents an asymmetrical double barrier with a quantum well of variable depth. Both the calculated and measured current-voltage characteristics of such nanostructures exhibit resonant tunneling features, such as steps and peaks, attesting electron resonant tunneling transport. The nanostructures have their origin in design, materials and technologies within the current integrated electronics so that they can be easily combined with its elements on one chip.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Galina G. Kareva, M. I. Vexler, I. Grekhov, and A. F. Shulekin "Resonant tunneling metal-oxide-silicon nanostructure", Proc. SPIE 5023, 10th International Symposium on Nanostructures: Physics and Technology, (11 June 2003); https://doi.org/10.1117/12.514615
PROCEEDINGS
4 PAGES


SHARE
Advertisement
Advertisement
Back to Top