1 April 2003 Particularities of IR-radiation absorbing in fine polyimide structures and microbolometer detector on their base
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Proceedings Volume 5025, Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics; (2003) https://doi.org/10.1117/12.498042
Event: Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2001, Moscow, Russian Federation
Abstract
The absorption of IR-radiation 200-4000 cm-1 range of 0,65-1,9 micron thick polyimide thin-films with such functional coverings as titanium, silicon nitride, aluminium was investigated. The 1,3-1,4 micron thick polyimide structure have 85% absorption of IR-radiation of 720-1250 cm-1 range. On the base of the developed polyimide thin-film technology linear micro bolometric array detectors was fabricated and investigated. Calculated value of the linear micro bolometer array detectivity is 4×107 cm Hz1/2W-1.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. A. Zhukov, A. A. Zhukov, A. E. Zdobnikov, A. E. Zdobnikov, S. N. Klemin, S. N. Klemin, Victor V. Tarasov, Victor V. Tarasov, L. A. Filatov, L. A. Filatov, Yu. S. Chetverov, Yu. S. Chetverov, } "Particularities of IR-radiation absorbing in fine polyimide structures and microbolometer detector on their base", Proc. SPIE 5025, Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 April 2003); doi: 10.1117/12.498042; https://doi.org/10.1117/12.498042
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