Development of a 10-kHz capillary discharge EUV lamp

Ouassima Sarroukh; Eric Robert; Thierry Gonthiez; Raymond Viladrosa; Moulay M. Idrissi; Claude Fleurier; Jean-Michel Pouvesle; Christophe Cachoncille

doi:10.1117/12.482330

16 June 2003 Development of a 10-kHz capillary discharge EUV lamp

Ouassima Sarroukh, Eric Robert, Thierry Gonthiez, Raymond Viladrosa, Moulay M. Idrissi, Claude Fleurier, Jean-Michel Pouvesle, Christophe Cachoncille

Author Affiliations +

Proceedings Volume 5037, Emerging Lithographic Technologies VII; (2003) https://doi.org/10.1117/12.482330
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

In this paper, an EUV lamp development based on high repetition rate compact capillary discharge devices is presented. The first lamp, named CAPELLA (Capillary EUV Lamp for Lithography Approach) emits up to 1 W in-band and has been selected as the illumination source of the first experimental European exposure tool (BEL). An industrial version of CAPELLA named PROXIMA has recently been operated and is the first commercial product of a new spin-off of GREMI called IGETECH. The design of a 10 kHz capillary discharge likely to emit up to 10 W in-band and labelled as ATλAS (AT wavelength Alternative Sources) is finally documented.

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Ouassima Sarroukh, Ouassima Sarroukh, Eric Robert, Eric Robert, Thierry Gonthiez, Thierry Gonthiez, Raymond Viladrosa, Raymond Viladrosa, Moulay M. Idrissi, Moulay M. Idrissi, Claude Fleurier, Claude Fleurier, Jean-Michel Pouvesle, Jean-Michel Pouvesle, Christophe Cachoncille, Christophe Cachoncille, } "Development of a 10-kHz capillary discharge EUV lamp", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); doi: 10.1117/12.482330; https://doi.org/10.1117/12.482330

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