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16 June 2003 High-conversion-efficiency tin material laser-plasma source for EUVL
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Abstract
One of the key leverage factors in determining the viability of laser-plasma sources for EUVL is the conversion efficiency of laser light to EUV emission in the 13-nm region. We describe experiments and theoretical calculations on a mass-limited laser target design using tin that offers high conversion efficiency.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chiew-Seng Koay, Christian K. Keyser, K. Takenoshita, Etsuo Fujiwara, Moza M. Al-Rabban, Martin C. Richardson, I. C. Edmond Turcu, Harry Rieger, A. Stone, and James H. Morris "High-conversion-efficiency tin material laser-plasma source for EUVL", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); https://doi.org/10.1117/12.504572
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