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16 June 2003 Use of tin as a plasma source material for high conversion efficiency
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Abstract
Debris-free generation of a tin plasma was demonstrated in the cavity-confined configuration. Narrow band emission at 13.7-nm was observed in an emission spectrum of a cavity confined tin plasma. The spectral efficiency was as high as 12% and we found the conversion efficiency could reach 6%/2π str ultimately while lots of works are required to achieve this value. We also confirmed a magnetic field has some effect of stopping a plasma.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Toshihisa Tomie, Tatsuya Aota, Yoshifumi Ueno, Gohta Niimi, Hidehiko Yashiro, Jingqian Lin, Isao Matsushima, Kazumasa Komiyama, Dong-Hoon Lee, Kentaro Nishigori, and Hiroshi Yokota "Use of tin as a plasma source material for high conversion efficiency", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); doi: 10.1117/12.483751; https://doi.org/10.1117/12.483751
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