2 June 2003 Characterization of charging in CD-SEM for 90-nm metrology and beyond
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Abstract
Three parameters, measurement times, charging distances, and charging area, are studied with respect to measurement of the local charging effect. We found that the effects of measurement times and charging distances to the local charging is under observation limit and the measured CD deviation is very small. However, the charging area is found to be the most dominant parameter for local charging. A 7-nm CD deviation from this local charging is observed. After the root cause of the local charging is understood and controlled, we use an extra charging area at the opposite side of the measurement site to compensate for the charging effect. The SEM image and CD deviation are greatly improved after this compensation. At last, a novel measurement algorithm is introduced to deal wiht the actual OPE evaluation. From simulation, the net Coulomb force experienced during the measurement is greatly reduced with the new algorithm compared with that used in the normal measurement sequence. The comparison of the global charging and local charging effects is also discussed in this report.
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Li-Jui Chen, Li-Jui Chen, Shang-Wei Lin, Shang-Wei Lin, Tsai-Sheng Gau, Tsai-Sheng Gau, Burn Jeng Lin, Burn Jeng Lin, } "Characterization of charging in CD-SEM for 90-nm metrology and beyond", Proc. SPIE 5038, Metrology, Inspection, and Process Control for Microlithography XVII, (2 June 2003); doi: 10.1117/12.483690; https://doi.org/10.1117/12.483690
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