2 June 2003 Copy result exactly using the EB-SCOPE technology
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Abstract
This paper presents the concept of 'copy result exactly' frameworks using EB-SCOPE technology which must be a powerful tool for coping the best process condition producing ever lasting good contact and via hole.
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Keizo Yamada, Takeo Ushiki, Yousuke Itagaki, Robert Newcomb, "Copy result exactly using the EB-SCOPE technology", Proc. SPIE 5038, Metrology, Inspection, and Process Control for Microlithography XVII, (2 June 2003); doi: 10.1117/12.485028; https://doi.org/10.1117/12.485028
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