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2 June 2003 Metrology of inkjet MEMS devices
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Abstract
The growing evolution of MEMS devices over the past decade from laboratory R&D environments into volume production settings for consumer use, has required Dimensional Metrology to become an invaluable part of the device fabrication process. In this paper we examine the dimensional metrology requirements for the Inkjet MEMS, and present high precision data obtained at a variety of fabrication stages. The measurement data has been used to guide process control on these structures and ultimately has led to improved device performance.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roger McKay, Susan Redmond, Ron Weller, Kuni Yamamoto, and Ganesh Sundaram "Metrology of inkjet MEMS devices", Proc. SPIE 5038, Metrology, Inspection, and Process Control for Microlithography XVII, (2 June 2003); https://doi.org/10.1117/12.487601
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