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12 June 2003 Novel spin-bowl-compatible, wet developable bottom anti-reflective coating for i-line applications
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Abstract
A novel spin-bowl-compatible bottom anti-reflective coating (BARC) for i-line applications is presented in this study. The BARCs were prepared from a titanate sol-gel material, which exhibits excellent spin-bowl compatibility with a wide variety of solvents. A variable angle spectroscopic ellipsometer measurement on the titanate BARC gives an n (real refractive index) value of 1.71 and a k (imaginary refractive index) value of 0.40. The titanate BARC shows good compatibility with resist solvents and excellent photolithography performance with resolution down to 0.35 μm. No metal contamination was observed with this BARC when gate oxide integrity (GOI) testing was performed on different size capacitors.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vandana N. Krishnamurthy, Charles J. Neef, and Stephen R. Turner "Novel spin-bowl-compatible, wet developable bottom anti-reflective coating for i-line applications", Proc. SPIE 5039, Advances in Resist Technology and Processing XX, (12 June 2003); https://doi.org/10.1117/12.483736
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