Inspection And Automation Systems For Test And Assembly

John Mathews

doi:10.1117/12.944848

4 December 1984 Inspection And Automation Systems For Test And Assembly

John Mathews

Proceedings Volume 0504, Applications of Digital Image Processing VII; (1984) https://doi.org/10.1117/12.944848
Event: 28th Annual Technical Symposium, 1984, San Diego, United States

Abstract

Machine vision systems have undergone dramatic changes in the last few years due to the rapid advances in microprocessors and specialized digital signal/image processing electronics. (1,2) This paper is a report of a alignment, inspection and measurement system, KLAASP, (KLA Automation System for Process Control). The applications of this machine vision system are initially directed toward the semiconductor test and assembly area where extensive optical alignment and inspection are required. (3,4)

Citation Download Citation

John Mathews "Inspection And Automation Systems For Test And Assembly", Proc. SPIE 0504, Applications of Digital Image Processing VII, (4 December 1984); https://doi.org/10.1117/12.944848

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