26 June 2003 Measurement of the refractive index and thermo-optic coefficient of water near 193 nm
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Proceedings Volume 5040, Optical Microlithography XVI; (2003); doi: 10.1117/12.504601
Event: Microlithography 2003, 2003, Santa Clara, California, United States
Abstract
We discuss our approaches for measuring the absolute index (n), and its dependencies on wavelength (dn/dλ) and temperature (dn/dT), of high-purity water for wavelengths near 193 nm, using the minimum deviation prism method and an interferometric technique. We present preliminary results for these quantities measured by the minimum deviation method.
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John H. Burnett, Simon Kaplan, "Measurement of the refractive index and thermo-optic coefficient of water near 193 nm", Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); doi: 10.1117/12.504601; https://doi.org/10.1117/12.504601
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KEYWORDS
Water

Prisms

Thermal optics

Microfluidics

Refractive index

Fabry–Perot interferometers

Mirrors

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