Optical anisotropy in the cubic crystal of CaF2: scaling arguments and their relation to dispersing absorption

Martin Letz; A. Gottwald; M. Richter; Matthias Brinkmann; G. Wehrhan; Lutz Parthier

doi:10.1117/12.485467

26 June 2003 On the optical anisotropy in the cubic crystal of CaF₂: scaling arguments and their relation to dispersing absorption

Martin Letz, A. Gottwald, M. Richter, Matthias Brinkmann, G. Wehrhan, Lutz Parthier

Author Affiliations +

Proceedings Volume 5040, Optical Microlithography XVI; (2003) https://doi.org/10.1117/12.485467
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

In this paper we present arguments for understanding the phenomenon of optical anisotropy in a perfectly cubic crystal such as CaF₂. To simplify the discussion we review the basic arguments which seem to preclude any optical anisotropy in a cubic crystal. We discuss the range of validity and define clear conditions for deviations of optical isotropy in cubic crystals. Length and energy scales involved in the problem of radiation-matter interaction for the DUV wavelength range around 157 nm are discussed. These scaling arguments naturally force us to focus on the role of absorption processes at higher photon energies (i.e. smaller wavelengths). Especially the role of a strong, dispersing absorption, in the case of CaF₂ caused by exciton excitation, is emphasized. Recent measurements of the anisotropy of the exciton resonance in CaF₂ are described and discussed in terms of the small optical anisotropy.

Citation Download Citation

Martin Letz, A. Gottwald, M. Richter, Matthias Brinkmann, G. Wehrhan, and Lutz Parthier "On the optical anisotropy in the cubic crystal of CaF₂: scaling arguments and their relation to dispersing absorption", Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); https://doi.org/10.1117/12.485467

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available