Optical rule checking for proximity-corrected mask shapes

Maharaj Mukherjee; Zachary Baum; John Nickel; Timothy G. Dunham

doi:10.1117/12.485477

26 June 2003 Optical rule checking for proximity-corrected mask shapes

Maharaj Mukherjee, Zachary Baum, John Nickel, Timothy G. Dunham

Proceedings Volume 5040, Optical Microlithography XVI; (2003) https://doi.org/10.1117/12.485477
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

Optical Rule Checking (ORC) is an important vehicle to predict the failure of wafer shapes due to the process proximity effects. Optical Proximity Correction (OPC) if not aided by ORC may cause severe failures affecting the yield in manufacturing. However, it is fairly complicated to do ORC on mask shapes that are pre-corrected either by rules-based or by model-based OPC. ORC is also a good tool to capture the problems that may occur at multi-layer interactions. We present a methodology to use both geometric directives and limited optical simulation to detect potential failures using ORC. We extend our methodology to multi-layer interactions. In case of multi-layer ORC, we present several approaches that deal with how to judiciously mix the geometric directives and the optical simulations for different layers. We show the ORC can help us design better rules for OPC.

Citation Download Citation

Maharaj Mukherjee, Zachary Baum, John Nickel, and Timothy G. Dunham "Optical rule checking for proximity-corrected mask shapes", Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); https://doi.org/10.1117/12.485477

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available