15 July 2003 Advanced ASIC defect control
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Chuck May, Chuck May, John Knoch, John Knoch, Roger Y. B. Young, Roger Y. B. Young, } "Advanced ASIC defect control", Proc. SPIE 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing, (15 July 2003); doi: 10.1117/12.497615; https://doi.org/10.1117/12.497615
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