10 July 2003 Library-based process test vehicle design framework
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This work describes a test vehicle design framework, which minimizes the discrepancy among design rule set, tests structure design and testing plan. The framework is composed of the symbolic design rule set, Parametereized-Device, test structure generator, and test vehicle generator. An approach for simplification and consolidation of test structure is proposed to derive the concise test structure library. Finally, implementation of test vehicle is presented.
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Kelvin Yih-Yuh Doong, Kelvin Yih-Yuh Doong, L.-J. Hung, L.-J. Hung, Susan Ho, Susan Ho, S. C. Lin, S. C. Lin, K. L. Young, K. L. Young, "Library-based process test vehicle design framework", Proc. SPIE 5042, Design and Process Integration for Microelectronic Manufacturing, (10 July 2003); doi: 10.1117/12.485264; https://doi.org/10.1117/12.485264


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