APC system health indicators, or why Cpks aren't good enough

Margaret Cromley

doi:10.1117/12.485302

1 July 2003 APC system health indicators, or why Cpks aren't good enough

Margaret Cromley

Author Affiliations +

Proceedings Volume 5044, Advanced Process Control and Automation; (2003) https://doi.org/10.1117/12.485302
Event: Advanced Microelectronic Manufacturing, 2003, Santa Clara, CA, United States

Abstract

APC system health should be monitored to ensure continuing effectiveness. The monitoring must include both input and output monitors. The proposed indicators of the overall health of the system include metrics to monitor the systematic variation of the output and the relationships of the input adjustments to the output as well as the acceptability of the output. Additional indicators are proposed to track the adjustments made by the APC system. Some indicators should be included to monitor the quality of the data, which is critical to the successful implementation of APC.

Citation Download Citation

Margaret Cromley, Margaret Cromley, } "APC system health indicators, or why Cpks aren't good enough", Proc. SPIE 5044, Advanced Process Control and Automation, (1 July 2003); doi: 10.1117/12.485302; https://doi.org/10.1117/12.485302

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