Paper
1 August 2003 A free energy model for thin-film shape memory alloys
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Abstract
Thin-film shape memory alloys (SMAs) have become excellent candidates for microactuator fabrication in MEMS. We develop a material model based on free energy principles combined with stochastic homogenization techniqies. In the first step of the development, we construct free energies and develop phase fraction and thermal evolution laws for homogeneous, single-crystal SMAs. Second, we extend the single-crystal model to accomodate material inhomogeneities and polycrystalline compounds. The combined model predicts rate-dependent, uniaxial SMA deformations due to applied stress and temperature. Moreover, the model admits a low-order formulation that is suitable for subsequent control design. We illustrate aspects of the model through comparison with thin-film NiTi superelastic hysteresis data.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jordan E. Massad, Ralph C. Smith, and Gregory Paul Carman "A free energy model for thin-film shape memory alloys", Proc. SPIE 5049, Smart Structures and Materials 2003: Modeling, Signal Processing, and Control, (1 August 2003); https://doi.org/10.1117/12.484017
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Cited by 8 scholarly publications.
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KEYWORDS
Shape memory alloys

Thin films

Data modeling

Temperature metrology

Microactuators

Microelectromechanical systems

Performance modeling

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