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1 August 2003 Analysis and modeling of a two-axis thin film piezoelectric actuator
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This paper concerns a beam-like two-axis piezoelectric actuator, suitable either for MEMS implementation using piezoelectric films deposited on a single surface of a substrate or for larger scale implementations using bulk piezoelectric actuator plates. An analysis of the mechanics of actuator is presented that quantifies the actuation effect in two perpendicular directions, depending on the pahsing of the actuation voltages applied. The analysis, based on consideration of the stress and strain transfer between the active and passive parts of the structure, extends previously published work on single-axis actuators and leads to the development of simple analytical formulae that are useful for design purposes. Comparison of analytical predictions with Finite Element simulations gives confidence in the validity of the analytical model.
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Xuesheng Chen, Colin H.J. Fox, and Stewart McWilliam "Analysis and modeling of a two-axis thin film piezoelectric actuator", Proc. SPIE 5049, Smart Structures and Materials 2003: Modeling, Signal Processing, and Control, (1 August 2003);

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