13 August 2003 Bistable shape memory thin film actuators
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Abstract
Shape memory alloys (SMA) are able to provide high work output when they undergo the martensitic transformation. Therefore, they present a favorable actuation mechanism for microsystems, e.g. for microvalves, switches or microgrippers. Sputter deposited thin SMA films are already in use as free-standing films or as composites in combination with a substrate. In the case of a composite, the substrate works as a bias spring and enables the SMA actuator to show a two way behavior. To enlarge the potentialities of shape memory based actuators a bistable principle is presented. This is realized by the combination with a polymer exhibiting a glass transition temperature (Tg) between the hysteresis loop of the shape memory composite. The fabrication of this composite is described with a special emphasis on the development of suitable polymer samples.
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Tobias Sterzl, Tobias Sterzl, Bernhard Winzek, Bernhard Winzek, Martina Mennicken, Martina Mennicken, Rene Nagelsdiek, Rene Nagelsdiek, Helmut Keul, Helmut Keul, Hartwig Hoecker, Hartwig Hoecker, Eckhard Quandt, Eckhard Quandt, } "Bistable shape memory thin film actuators", Proc. SPIE 5053, Smart Structures and Materials 2003: Active Materials: Behavior and Mechanics, (13 August 2003); doi: 10.1117/12.484696; https://doi.org/10.1117/12.484696
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