Large-stroke low-profile single-crystal piezoelectric actuators

Xiaoning Jiang; Paul W. Rehrig; Wesley S. Hackenberger; Thomas R. Shrout

doi:10.1117/12.484199

13 August 2003 Large-stroke low-profile single-crystal piezoelectric actuators

Xiaoning Jiang, Paul W. Rehrig, Wesley S. Hackenberger, Thomas R. Shrout

Proceedings Volume 5053, Smart Structures and Materials 2003: Active Materials: Behavior and Mechanics; (2003) https://doi.org/10.1117/12.484199
Event: Smart Structures and Materials, 2003, San Diego, California, United States

Abstract

TRS single crystal plates with special crystal orientations and dimensions of 10×5×0.5mm were prepared, and the in-plane strain-electric field behavior was measured using a modified Sawyer-Tower circuit with an LVDT. A d₃₂ coefficient as high as -1600 pm/V was observed which is 60-75% higher than d₃₁ in the conventional cut crystal. The increased performance of this cut can be directly applied to bending mode actuators and other devices that utilize the d₃₁ mode. The strain response was both linear and non-hysteretic up to 15 kV/cm. Large stroke and highly directional strain was also achieved from a quasi-d₃₃ mode single crystal plate with interdigital electrodes (IDE). These were prepared with plate thickness of 0.2 mm, and an effective d₃₃>1000 pC/N was obtained under 10 KV/cm driving field. Both types of plate actuators show at least 5 times larger piezoelectric coefficient than the d₃₁ of PZT materials. Amplified out-of-plane stroke could be easily achieved by integrating the developed thin plate actuators into unimorph, bimorph, or moonie structures.

Citation Download Citation

Xiaoning Jiang, Paul W. Rehrig, Wesley S. Hackenberger, and Thomas R. Shrout "Large-stroke low-profile single-crystal piezoelectric actuators", Proc. SPIE 5053, Smart Structures and Materials 2003: Active Materials: Behavior and Mechanics, (13 August 2003); https://doi.org/10.1117/12.484199

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