22 July 2003 Bilateral interdigital CPW phase shifter using BaSrTiO3 thin film on poly-Si/Si substrate for electronically steerable antenna architecture
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Abstract
In this paper the design and development of a planar phase shifter on poly-Si/high resistivity silicon is presented. A new bilateral interdigital coplanar waveguide (BI-CPW) configuration has been developed to get higher effective dielectric constant than normal CPW having same dimensions. This design makes use of BaSrTiO3 thin film effectively. A new process flow has been developed to enable full compatibility with emerging SiGe/Si technology. Another important feature of this design is the inclusion of a poly-Si layer for lowering operation voltage.
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Hargsoon Yoon, K. J. Vinoy, Jose K. Abraham, Vijay K. Varadan, "Bilateral interdigital CPW phase shifter using BaSrTiO3 thin film on poly-Si/Si substrate for electronically steerable antenna architecture", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); doi: 10.1117/12.497436; https://doi.org/10.1117/12.497436
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