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22 July 2003 Manufacturing and applications of polymer and ceramic MEMS from a novel material process for harsh environments
Li-Anne Liew, Rishi Raj
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Proceedings Volume 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2003) https://doi.org/10.1117/12.497447
Event: Smart Structures and Materials, 2003, San Diego, California, United States
Abstract
This paper summarizes very recent developments in the MEMS application of a novel material-class, manufactured by new processing methods. This technology has two unique aspects: (1) The materials form a continuum from high temperature polymers to ultrahigh temperature ceramics. We call them polymer-derived-ceramics (PDCs). In addition to being mechanically robust and chemically inert, the PDCs can be functionalized to embody electronic, optical and magnetic properties. (2) PDC-MEMS are processed from liquid precursors by a simple UV photolithographic photo-curing process. Multilayer structures can be made by stereo lithography or by simple bonding of the polymer structures. The PDC-MEMS technology will be demonstrated by two examples: an optical grating made from the transparent polymer version of the PDC, and a microigniter operating at 1300-1500°C made from the ceramic version. A special feature of the Colorado work is the development of a real-time human-machine-interface (HMI) along-side the design and testing of the MEMS devices. For example, a live HMI for the microigniter gives information such as tip temperature, remaining life and damage accumulation. Finally, the PDC-MEMS technology is inexpensive.
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Li-Anne Liew and Rishi Raj "Manufacturing and applications of polymer and ceramic MEMS from a novel material process for harsh environments", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); https://doi.org/10.1117/12.497447
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Cited by 3 scholarly publications.
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KEYWORDS
Polymers
Microelectromechanical systems
Ceramics
Diffraction gratings
Liquids
Semiconducting wafers
Silicon
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