Nanoparticle films made by gas phase synthesis: comparison of various techniques and sensor applications

Peter Heszler; L. F. Reyes; Anders Hoel; Lars Landstrom; V. Lantto; Claes-Goran Granqvist

doi:10.1117/12.497440

22 July 2003 Nanoparticle films made by gas phase synthesis: comparison of various techniques and sensor applications

Peter Heszler, L. F. Reyes, Anders Hoel, Lars Landstrom, V. Lantto, Claes-Goran Granqvist

Proceedings Volume 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2003) https://doi.org/10.1117/12.497440
Event: Smart Structures and Materials, 2003, San Diego, California, United States

Abstract

Nanoparticles can be generated by several different gas phase methods, such as gas deposition, laser-assisted chemical vapor deposition, and laser ablation. Some of the most important aspects - such as size-distribution, structure, and chemical composition of the generated nanoparticles (specifically W and WO₃) - are presented and compared. WO₃ nanoparticle films were deposited by an advanced gas deposition technique and were tested for sensor applications. Two different sensor devices were fabricated: Firstly, a thin Au-WO₃ nanoparticle sandwich film was constructed, and conductance fluctuations of the Au film were measured as the sensor was exposed to alcohol vapor. Secondly, conductivity changes of a thick WO₃ nanoparticle film were detected as it was exposed to test gases (H₂S, NO₂, and CO).

Citation Download Citation

Peter Heszler, L. F. Reyes, Anders Hoel, Lars Landstrom, V. Lantto, and Claes-Goran Granqvist "Nanoparticle films made by gas phase synthesis: comparison of various techniques and sensor applications", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); https://doi.org/10.1117/12.497440

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