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22 July 2003 Nanoparticle films made by gas phase synthesis: comparison of various techniques and sensor applications
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Abstract
Nanoparticles can be generated by several different gas phase methods, such as gas deposition, laser-assisted chemical vapor deposition, and laser ablation. Some of the most important aspects - such as size-distribution, structure, and chemical composition of the generated nanoparticles (specifically W and WO3) - are presented and compared. WO3 nanoparticle films were deposited by an advanced gas deposition technique and were tested for sensor applications. Two different sensor devices were fabricated: Firstly, a thin Au-WO3 nanoparticle sandwich film was constructed, and conductance fluctuations of the Au film were measured as the sensor was exposed to alcohol vapor. Secondly, conductivity changes of a thick WO3 nanoparticle film were detected as it was exposed to test gases (H2S, NO2, and CO).
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Peter Heszler, L. F. Reyes, Anders Hoel, Lars Landstrom, V. Lantto, and Claes-Goran Granqvist "Nanoparticle films made by gas phase synthesis: comparison of various techniques and sensor applications", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); https://doi.org/10.1117/12.497440
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