UV-curable polymers with functionalized carbon nanotubes for MEMS

Jining Xie; Nanyan Zhang; Manton Guers; Vijay K. Varadan

doi:10.1117/12.497448

22 July 2003 UV-curable polymers with functionalized carbon nanotubes for MEMS

Jining Xie, Nanyan Zhang, Manton Guers, Vijay K. Varadan

Proceedings Volume 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2003) https://doi.org/10.1117/12.497448
Event: Smart Structures and Materials, 2003, San Diego, California, United States

Abstract

Current ultraviolet (UV) curable polymer techniques for MEMS fabrication pose certain challenges due to the electrical and mechanical properties of the polymer. A novel UV-curable polymer uniformly bonded with functionalized nanotubes was synthesized via a modified three-step in-situ polymerization. Purified multi-walled nanotubes, gained from the microwave chemical vapor deposition method, were functionalized by oxidation. X-ray photoelectron spectroscopy (XPS) was used to identify the -OH and -COOH groups attached to nanotube surface. The UV curable polymer was prepared from toluene diisocyanate (TDI), functionalized nanotubes, and 2-hydroxyethyl methacrylate (HEMA). The chemical bonds between -NCO groups of TDI and -OH, -COOH groups of functionalized nanotubes were confirmed by Fourier transform infrared (FTIR) spectra. This new UV-curable polymer is expected to be a cost-effective solution with a variety of applications in UV coating, phase shifters for telecommunications and global positioning systems, and polymer and BioMEMS devices.

Citation Download Citation

Jining Xie, Nanyan Zhang, Manton Guers, and Vijay K. Varadan "UV-curable polymers with functionalized carbon nanotubes for MEMS", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); https://doi.org/10.1117/12.497448

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