14 October 2003 Capacitive pressure sensor for MEMS
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Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514570
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India
Pressure sensors have widespread applications in medicine and automotive industry. Specific designs and mounting arrangements vary considerably, ranging from small, sensitive catheter-tip transducers used within the heart to the bigger, rugged devices needed for industrial process control. A capacitive type of pressure sensor has been made using bulk silicon micromachining. It converts the diaphragm deformation, corresponding to pressure, into a change of capacitance. The total change in capacitance is the integral of the change of capacitance of each small area on the diaphragm. The change of capacitance δC/C is measured as a function of deformation or pressure. The diaphragm deflection has been modelled using Intellisuite sofware.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Amita Gupta, Amita Gupta, Amir Ahmad, Amir Ahmad, Ranvir Singh, Ranvir Singh, } "Capacitive pressure sensor for MEMS", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514570; https://doi.org/10.1117/12.514570

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