Pressure sensors have widespread applications in medicine and automotive industry. Specific designs and mounting arrangements vary considerably, ranging from small, sensitive catheter-tip transducers used within the heart to the bigger, rugged devices needed for industrial process control. A capacitive type of pressure sensor has been made using bulk silicon micromachining. It converts the diaphragm deformation, corresponding to pressure, into a change of capacitance. The total change in capacitance is the integral of the change of capacitance of each small area on the diaphragm. The change of capacitance δC/C is measured as a function of deformation or pressure. The diaphragm deflection has been modelled using Intellisuite sofware.
"Capacitive pressure sensor for MEMS", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514570; https://doi.org/10.1117/12.514570